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MOCVD-1
Size of wafers :
 φ200mm (applicable to φ150mm by changing parts.)
Temperature for film deposition :
 Max. 700°C
Simultaneously usable materials :
 Max. 4 systems

MOCVD-2
Size of wafers :
 φ200mm
Temperature for film deposition :
 Max. 550°C
Simultaneously usable materials :
 Max. 3 systems

MOCVD-3
Size of wafers :
 φ200mm
Temperature for film deposition :
 Max. 550°C
Simultaneously usable materials :
 Max. 4 systems

 
 
 
Environment for film deposition
Designated clean room :
 CLASS1000
 Installation of systems,  
 Purification of the maintenance environment
Designated clean booth :
 CLASS10
 To feed and eject cassette wafers,
 Purification of the control environment
Designated clean bench :
 CLASS10
 Storage of cassette,
 Purification of the wafers delivery process

The inspection environment
Fluorescent X ray analysis system :
 To confirm composition and film thickness
  (beyond the warranty).
   RIGAKU / System 3272 NEW
Resistivity measuring system :
 To measure resistivity of metal film.
   DIA INSTRUMENTS / MCP-T610
Electric characteristics evaluation system :
 To confirm ferroelectric characteristics (preparing).
   Radiant / PrecisionLC

The cleaning environment
Wet etching draft :
 Cleaning of parts of the system.
Clean oven :
 Drying of parts after cleaning.

 
 
 
SBT, PZT, BLT, BNT, BIT
Ir, IrOx, TiOx, Ta2O5, ZrOx, LaOx, Al2O3, Ru, RuOx, Pt, HfOx, ZnO, STO, YBCO, LiTaO3

 
 
 
Measurement of film thickness and composition (measured only at the center point), inspection (visual) of breakage, cracks, and chipping.

 
 
 
As a rule, customers are expected to supply wafers.  *At customers’ request, we will prepare wafers to be paid.

 
 
 
Our resistivity measuring system is able to measure resistivity of metal film.
By consigning to supporting companies, we are able to meet requirement in great variety such as XRD (X ray diffraction) inspection, SEM observation, TEM observation, AFM observation, SIMS observation, patterning processing, pre/post cleaning, sputtering film deposition.

 

Make inquiries about film deposition consignment from here.

 
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